The excimer laser-induced ripple structures at the interfaces of silicon-dioxide/silicon substrates

The excimer laser-induced ripple structures at the interfaces of silicon-dioxide/silicon substrates

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

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Bibliographic Details
Main Authors: Lu, Y.F., Yu, J.J., Choi, W.K.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Far-ultraviolet radiation
Interface
Interface structure and roughness
Laser surface modification
Microstructure
Silicon-dioxide film
Silicon-dioxide/silicon system
Online Access:http://scholarbank.nus.edu.sg/handle/10635/62860
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Institution: National University of Singapore
Description
Summary:Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

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