The excimer laser-induced ripple structures at the interfaces of silicon-dioxide/silicon substrates
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
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Main Authors: | Lu, Y.F., Yu, J.J., Choi, W.K. |
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Other Authors: | ELECTRICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/62860 |
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Institution: | National University of Singapore |
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