TMAH etching of silicon and the interaction of etching parameters

TMAH etching of silicon and the interaction of etching parameters

Sensors and Actuators, A: Physical

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Bibliographic Details
Main Authors: Thong, J.T.L., Choi, W.K., Chong, C.W.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Etching parameters
Silicon
Tetramethylammonium hydroxide (TMAH)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/62884
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Institution: National University of Singapore
Description
Summary:Sensors and Actuators, A: Physical

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