TMAH etching of silicon and the interaction of etching parameters

Sensors and Actuators, A: Physical

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Bibliographic Details
Main Authors:	Thong, J.T.L., Choi, W.K., Chong, C.W.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Etching parameters Silicon Tetramethylammonium hydroxide (TMAH)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/62884
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-62884
record_format	dspace
spelling	sg-nus-scholar.10635-628842015-01-05T23:23:43Z TMAH etching of silicon and the interaction of etching parameters Thong, J.T.L. Choi, W.K. Chong, C.W. ELECTRICAL ENGINEERING Etching parameters Silicon Tetramethylammonium hydroxide (TMAH) Sensors and Actuators, A: Physical 63 3 243-249 SAAPE 2014-06-17T06:55:56Z 2014-06-17T06:55:56Z 1997-12 Article Thong, J.T.L.,Choi, W.K.,Chong, C.W. (1997-12). TMAH etching of silicon and the interaction of etching parameters. Sensors and Actuators, A: Physical 63 (3) : 243-249. ScholarBank@NUS Repository. 09244247 http://scholarbank.nus.edu.sg/handle/10635/62884 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Etching parameters Silicon Tetramethylammonium hydroxide (TMAH)
spellingShingle	Etching parameters Silicon Tetramethylammonium hydroxide (TMAH) Thong, J.T.L. Choi, W.K. Chong, C.W. TMAH etching of silicon and the interaction of etching parameters
description	Sensors and Actuators, A: Physical
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Thong, J.T.L. Choi, W.K. Chong, C.W.
format	Article
author	Thong, J.T.L. Choi, W.K. Chong, C.W.
author_sort	Thong, J.T.L.
title	TMAH etching of silicon and the interaction of etching parameters
title_short	TMAH etching of silicon and the interaction of etching parameters
title_full	TMAH etching of silicon and the interaction of etching parameters
title_fullStr	TMAH etching of silicon and the interaction of etching parameters
title_full_unstemmed	TMAH etching of silicon and the interaction of etching parameters
title_sort	tmah etching of silicon and the interaction of etching parameters
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/62884
_version_	1681085857465892864

TMAH etching of silicon and the interaction of etching parameters

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