Electrochemical anodization of silicon-on-insulator wafers using an AC

10.1149/1.3431038

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Bibliographic Details
Main Authors:	Breese, M.B.H., Azimi, S., Ow, Y.S., Mangaiyarkarasi, D., Chan, T.K., Jiao, S., Dang, Z.Y., Blackwood, D.J.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/64860
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Institution:	National University of Singapore

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Summary:	10.1149/1.3431038

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