Electrochemical anodization of silicon-on-insulator wafers using an AC

10.1149/1.3431038

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Bibliographic Details
Main Authors:	Breese, M.B.H., Azimi, S., Ow, Y.S., Mangaiyarkarasi, D., Chan, T.K., Jiao, S., Dang, Z.Y., Blackwood, D.J.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/64860
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-64860
record_format	dspace
spelling	sg-nus-scholar.10635-648602023-10-26T20:52:05Z Electrochemical anodization of silicon-on-insulator wafers using an AC Breese, M.B.H. Azimi, S. Ow, Y.S. Mangaiyarkarasi, D. Chan, T.K. Jiao, S. Dang, Z.Y. Blackwood, D.J. PHYSICS MATERIALS SCIENCE AND ENGINEERING 10.1149/1.3431038 Electrochemical and Solid-State Letters 13 8 H271-H273 ESLEF 2014-06-17T07:58:20Z 2014-06-17T07:58:20Z 2010 Article Breese, M.B.H., Azimi, S., Ow, Y.S., Mangaiyarkarasi, D., Chan, T.K., Jiao, S., Dang, Z.Y., Blackwood, D.J. (2010). Electrochemical anodization of silicon-on-insulator wafers using an AC. Electrochemical and Solid-State Letters 13 (8) : H271-H273. ScholarBank@NUS Repository. https://doi.org/10.1149/1.3431038 10990062 http://scholarbank.nus.edu.sg/handle/10635/64860 000278694500025 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1149/1.3431038
author2	PHYSICS
author_facet	PHYSICS Breese, M.B.H. Azimi, S. Ow, Y.S. Mangaiyarkarasi, D. Chan, T.K. Jiao, S. Dang, Z.Y. Blackwood, D.J.
format	Article
author	Breese, M.B.H. Azimi, S. Ow, Y.S. Mangaiyarkarasi, D. Chan, T.K. Jiao, S. Dang, Z.Y. Blackwood, D.J.
spellingShingle	Breese, M.B.H. Azimi, S. Ow, Y.S. Mangaiyarkarasi, D. Chan, T.K. Jiao, S. Dang, Z.Y. Blackwood, D.J. Electrochemical anodization of silicon-on-insulator wafers using an AC
author_sort	Breese, M.B.H.
title	Electrochemical anodization of silicon-on-insulator wafers using an AC
title_short	Electrochemical anodization of silicon-on-insulator wafers using an AC
title_full	Electrochemical anodization of silicon-on-insulator wafers using an AC
title_fullStr	Electrochemical anodization of silicon-on-insulator wafers using an AC
title_full_unstemmed	Electrochemical anodization of silicon-on-insulator wafers using an AC
title_sort	electrochemical anodization of silicon-on-insulator wafers using an ac
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/64860
_version_	1781782512210542592

Electrochemical anodization of silicon-on-insulator wafers using an AC

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