Optical evaluation of ingot fixity in semiconductor wafer slicing

Optical evaluation of ingot fixity in semiconductor wafer slicing

10.1016/j.optlastec.2004.01.017

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Bibliographic Details
Main Authors: Ng, T.W., Nallathamby, R.
Other Authors: BACHELOR OF TECHNOLOGY PROGRAMME
Format: Article
Published: 2014
Subjects:
Ingot fixity
Optical deflection
Optical metrology
Wafer slicing
Online Access:http://scholarbank.nus.edu.sg/handle/10635/67788
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Institution: National University of Singapore
Description
Summary:10.1016/j.optlastec.2004.01.017

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