Optical evaluation of ingot fixity in semiconductor wafer slicing

10.1016/j.optlastec.2004.01.017

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Bibliographic Details
Main Authors:	Ng, T.W., Nallathamby, R.
Other Authors:	BACHELOR OF TECHNOLOGY PROGRAMME
Format:	Article
Published:	2014
Subjects:	Ingot fixity Optical deflection Optical metrology Wafer slicing
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/67788
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-67788
record_format	dspace
spelling	sg-nus-scholar.10635-677882023-10-26T07:19:31Z Optical evaluation of ingot fixity in semiconductor wafer slicing Ng, T.W. Nallathamby, R. BACHELOR OF TECHNOLOGY PROGRAMME Ingot fixity Optical deflection Optical metrology Wafer slicing 10.1016/j.optlastec.2004.01.017 Optics and Laser Technology 36 8 641-645 OLTCA 2014-06-18T05:09:23Z 2014-06-18T05:09:23Z 2004-11 Article Ng, T.W., Nallathamby, R. (2004-11). Optical evaluation of ingot fixity in semiconductor wafer slicing. Optics and Laser Technology 36 (8) : 641-645. ScholarBank@NUS Repository. https://doi.org/10.1016/j.optlastec.2004.01.017 00303992 http://scholarbank.nus.edu.sg/handle/10635/67788 000223756400007 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Ingot fixity Optical deflection Optical metrology Wafer slicing
spellingShingle	Ingot fixity Optical deflection Optical metrology Wafer slicing Ng, T.W. Nallathamby, R. Optical evaluation of ingot fixity in semiconductor wafer slicing
description	10.1016/j.optlastec.2004.01.017
author2	BACHELOR OF TECHNOLOGY PROGRAMME
author_facet	BACHELOR OF TECHNOLOGY PROGRAMME Ng, T.W. Nallathamby, R.
format	Article
author	Ng, T.W. Nallathamby, R.
author_sort	Ng, T.W.
title	Optical evaluation of ingot fixity in semiconductor wafer slicing
title_short	Optical evaluation of ingot fixity in semiconductor wafer slicing
title_full	Optical evaluation of ingot fixity in semiconductor wafer slicing
title_fullStr	Optical evaluation of ingot fixity in semiconductor wafer slicing
title_full_unstemmed	Optical evaluation of ingot fixity in semiconductor wafer slicing
title_sort	optical evaluation of ingot fixity in semiconductor wafer slicing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/67788
_version_	1781782918575685632

Optical evaluation of ingot fixity in semiconductor wafer slicing

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