Optical surface roughness evaluation of phosphorus-doped polysilicon films
10.1016/S0143-8166(00)00107-X
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sg-nus-scholar.10635-677902023-10-25T22:19:57Z Optical surface roughness evaluation of phosphorus-doped polysilicon films Ng, T.W. Teo, T.W. Rajendra, P. BACHELOR OF TECHNOLOGY PROGRAMME 10.1016/S0143-8166(00)00107-X Optics and Lasers in Engineering 35 1 1-9 OLEND 2014-06-18T05:09:24Z 2014-06-18T05:09:24Z 2001-01 Article Ng, T.W., Teo, T.W., Rajendra, P. (2001-01). Optical surface roughness evaluation of phosphorus-doped polysilicon films. Optics and Lasers in Engineering 35 (1) : 1-9. ScholarBank@NUS Repository. https://doi.org/10.1016/S0143-8166(00)00107-X 01438166 http://scholarbank.nus.edu.sg/handle/10635/67790 000167364300001 Scopus |
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National University of Singapore |
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Singapore Singapore |
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| description |
10.1016/S0143-8166(00)00107-X |
| author2 |
BACHELOR OF TECHNOLOGY PROGRAMME |
| author_facet |
BACHELOR OF TECHNOLOGY PROGRAMME Ng, T.W. Teo, T.W. Rajendra, P. |
| format |
Article |
| author |
Ng, T.W. Teo, T.W. Rajendra, P. |
| spellingShingle |
Ng, T.W. Teo, T.W. Rajendra, P. Optical surface roughness evaluation of phosphorus-doped polysilicon films |
| author_sort |
Ng, T.W. |
| title |
Optical surface roughness evaluation of phosphorus-doped polysilicon films |
| title_short |
Optical surface roughness evaluation of phosphorus-doped polysilicon films |
| title_full |
Optical surface roughness evaluation of phosphorus-doped polysilicon films |
| title_fullStr |
Optical surface roughness evaluation of phosphorus-doped polysilicon films |
| title_full_unstemmed |
Optical surface roughness evaluation of phosphorus-doped polysilicon films |
| title_sort |
optical surface roughness evaluation of phosphorus-doped polysilicon films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/67790 |
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1781782919190151168 |