Optical surface roughness evaluation of phosphorus-doped polysilicon films
10.1016/S0143-8166(00)00107-X
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Main Authors: | Ng, T.W., Teo, T.W., Rajendra, P. |
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Other Authors: | BACHELOR OF TECHNOLOGY PROGRAMME |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/67790 |
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Institution: | National University of Singapore |
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