A state-of-the-art review of ductile cutting of silicon wafers for semiconductor and microelectronics industries
10.1007/s00170-012-3937-2
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2014
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sg-nus-scholar.10635-680992023-10-25T22:49:41Z A state-of-the-art review of ductile cutting of silicon wafers for semiconductor and microelectronics industries Arif, M. Rahman, M. San, W.Y. MECHANICAL ENGINEERING Ductile-mode machining Silicon machining Silicon wafers Ultraprecision machining 10.1007/s00170-012-3937-2 International Journal of Advanced Manufacturing Technology 63 5-8 481-504 IJATE 2014-06-18T06:09:44Z 2014-06-18T06:09:44Z 2012-11 Review Arif, M., Rahman, M., San, W.Y. (2012-11). A state-of-the-art review of ductile cutting of silicon wafers for semiconductor and microelectronics industries. International Journal of Advanced Manufacturing Technology 63 (5-8) : 481-504. ScholarBank@NUS Repository. https://doi.org/10.1007/s00170-012-3937-2 02683768 http://scholarbank.nus.edu.sg/handle/10635/68099 000310320800005 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Ductile-mode machining Silicon machining Silicon wafers Ultraprecision machining |
| spellingShingle |
Ductile-mode machining Silicon machining Silicon wafers Ultraprecision machining Arif, M. Rahman, M. San, W.Y. A state-of-the-art review of ductile cutting of silicon wafers for semiconductor and microelectronics industries |
| description |
10.1007/s00170-012-3937-2 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Arif, M. Rahman, M. San, W.Y. |
| format |
Review |
| author |
Arif, M. Rahman, M. San, W.Y. |
| author_sort |
Arif, M. |
| title |
A state-of-the-art review of ductile cutting of silicon wafers for semiconductor and microelectronics industries |
| title_short |
A state-of-the-art review of ductile cutting of silicon wafers for semiconductor and microelectronics industries |
| title_full |
A state-of-the-art review of ductile cutting of silicon wafers for semiconductor and microelectronics industries |
| title_fullStr |
A state-of-the-art review of ductile cutting of silicon wafers for semiconductor and microelectronics industries |
| title_full_unstemmed |
A state-of-the-art review of ductile cutting of silicon wafers for semiconductor and microelectronics industries |
| title_sort |
state-of-the-art review of ductile cutting of silicon wafers for semiconductor and microelectronics industries |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/68099 |
| _version_ |
1781782961101733888 |