A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms

A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms

10.1109/OMEMS.2012.6318890

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Bibliographic Details
Main Authors: Koh, K.H., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Hybrid Actuation
Mirror
Optical Microelectromechanical Systems
Online Access:http://scholarbank.nus.edu.sg/handle/10635/68856
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Institution: National University of Singapore
Description
Summary:10.1109/OMEMS.2012.6318890

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