A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms
10.1109/OMEMS.2012.6318890
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sg-nus-scholar.10635-688562015-01-16T13:56:00Z A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms Koh, K.H. Lee, C. ELECTRICAL & COMPUTER ENGINEERING Hybrid Actuation Mirror Optical Microelectromechanical Systems 10.1109/OMEMS.2012.6318890 International Conference on Optical MEMS and Nanophotonics 236-237 2014-06-19T02:53:59Z 2014-06-19T02:53:59Z 2012 Conference Paper Koh, K.H.,Lee, C. (2012). A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms. International Conference on Optical MEMS and Nanophotonics : 236-237. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/OMEMS.2012.6318890" target="_blank">https://doi.org/10.1109/OMEMS.2012.6318890</a> 9781457715112 21605033 http://scholarbank.nus.edu.sg/handle/10635/68856 NOT_IN_WOS Scopus |
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Hybrid Actuation Mirror Optical Microelectromechanical Systems |
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Hybrid Actuation Mirror Optical Microelectromechanical Systems Koh, K.H. Lee, C. A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms |
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10.1109/OMEMS.2012.6318890 |
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ELECTRICAL & COMPUTER ENGINEERING |
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ELECTRICAL & COMPUTER ENGINEERING Koh, K.H. Lee, C. |
format |
Conference or Workshop Item |
author |
Koh, K.H. Lee, C. |
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Koh, K.H. |
title |
A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms |
title_short |
A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms |
title_full |
A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms |
title_fullStr |
A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms |
title_full_unstemmed |
A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms |
title_sort |
low power 2-d raster scanning mems mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/68856 |
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1681086907255095296 |