A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms

10.1109/OMEMS.2012.6318890

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Bibliographic Details
Main Authors: Koh, K.H., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/68856
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-688562015-01-16T13:56:00Z A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms Koh, K.H. Lee, C. ELECTRICAL & COMPUTER ENGINEERING Hybrid Actuation Mirror Optical Microelectromechanical Systems 10.1109/OMEMS.2012.6318890 International Conference on Optical MEMS and Nanophotonics 236-237 2014-06-19T02:53:59Z 2014-06-19T02:53:59Z 2012 Conference Paper Koh, K.H.,Lee, C. (2012). A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms. International Conference on Optical MEMS and Nanophotonics : 236-237. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/OMEMS.2012.6318890" target="_blank">https://doi.org/10.1109/OMEMS.2012.6318890</a> 9781457715112 21605033 http://scholarbank.nus.edu.sg/handle/10635/68856 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Hybrid Actuation
Mirror
Optical Microelectromechanical Systems
spellingShingle Hybrid Actuation
Mirror
Optical Microelectromechanical Systems
Koh, K.H.
Lee, C.
A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms
description 10.1109/OMEMS.2012.6318890
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Koh, K.H.
Lee, C.
format Conference or Workshop Item
author Koh, K.H.
Lee, C.
author_sort Koh, K.H.
title A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms
title_short A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms
title_full A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms
title_fullStr A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms
title_full_unstemmed A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms
title_sort low power 2-d raster scanning mems mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/68856
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