Challenges in the development of precise positioning systems for MEMS/nanotechnology

Challenges in the development of precise positioning systems for MEMS/nanotechnology

10.1117/12.548710

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Bibliographic Details
Main Authors: Zhao, S., Tan, K.K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Disturbance observer
Geometrical error compensation
Notch filter
Precise positioning systems
Ripple compensation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69576
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/69576

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