Challenges in the development of precise positioning systems for MEMS/nanotechnology

10.1117/12.548710

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Bibliographic Details
Main Authors:	Zhao, S., Tan, K.K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Disturbance observer Geometrical error compensation Notch filter Precise positioning systems Ripple compensation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/69576
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Institution:	National University of Singapore

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