Challenges in the development of precise positioning systems for MEMS/nanotechnology

10.1117/12.548710

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Bibliographic Details
Main Authors:	Zhao, S., Tan, K.K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Disturbance observer Geometrical error compensation Notch filter Precise positioning systems Ripple compensation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/69576
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-69576
record_format	dspace
spelling	sg-nus-scholar.10635-695762024-11-10T08:40:51Z Challenges in the development of precise positioning systems for MEMS/nanotechnology Zhao, S. Tan, K.K. ELECTRICAL & COMPUTER ENGINEERING Disturbance observer Geometrical error compensation Notch filter Precise positioning systems Ripple compensation 10.1117/12.548710 Proceedings of SPIE - The International Society for Optical Engineering 5276 119-130 PSISD 2014-06-19T03:02:14Z 2014-06-19T03:02:14Z 2004 Conference Paper Zhao, S., Tan, K.K. (2004). Challenges in the development of precise positioning systems for MEMS/nanotechnology. Proceedings of SPIE - The International Society for Optical Engineering 5276 : 119-130. ScholarBank@NUS Repository. https://doi.org/10.1117/12.548710 0277786X http://scholarbank.nus.edu.sg/handle/10635/69576 000221558600018 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Disturbance observer Geometrical error compensation Notch filter Precise positioning systems Ripple compensation
spellingShingle	Disturbance observer Geometrical error compensation Notch filter Precise positioning systems Ripple compensation Zhao, S. Tan, K.K. Challenges in the development of precise positioning systems for MEMS/nanotechnology
description	10.1117/12.548710
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Zhao, S. Tan, K.K.
format	Conference or Workshop Item
author	Zhao, S. Tan, K.K.
author_sort	Zhao, S.
title	Challenges in the development of precise positioning systems for MEMS/nanotechnology
title_short	Challenges in the development of precise positioning systems for MEMS/nanotechnology
title_full	Challenges in the development of precise positioning systems for MEMS/nanotechnology
title_fullStr	Challenges in the development of precise positioning systems for MEMS/nanotechnology
title_full_unstemmed	Challenges in the development of precise positioning systems for MEMS/nanotechnology
title_sort	challenges in the development of precise positioning systems for mems/nanotechnology
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/69576
_version_	1821182714647150592

Challenges in the development of precise positioning systems for MEMS/nanotechnology

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