Design of a multiple-electron-beam imaging technique for surface inspection
10.1116/1.3253611
Saved in:
| Main Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/69852 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-69852 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-698522023-10-30T20:37:12Z Design of a multiple-electron-beam imaging technique for surface inspection Luo, T. Khursheed, A. Osterberg, M. Hoang, H. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.3253611 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 27 6 3256-3260 JVTBD 2014-06-19T03:05:25Z 2014-06-19T03:05:25Z 2009 Conference Paper Luo, T., Khursheed, A., Osterberg, M., Hoang, H. (2009). Design of a multiple-electron-beam imaging technique for surface inspection. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 27 (6) : 3256-3260. ScholarBank@NUS Repository. https://doi.org/10.1116/1.3253611 10711023 http://scholarbank.nus.edu.sg/handle/10635/69852 000272803400185 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1116/1.3253611 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Luo, T. Khursheed, A. Osterberg, M. Hoang, H. |
| format |
Conference or Workshop Item |
| author |
Luo, T. Khursheed, A. Osterberg, M. Hoang, H. |
| spellingShingle |
Luo, T. Khursheed, A. Osterberg, M. Hoang, H. Design of a multiple-electron-beam imaging technique for surface inspection |
| author_sort |
Luo, T. |
| title |
Design of a multiple-electron-beam imaging technique for surface inspection |
| title_short |
Design of a multiple-electron-beam imaging technique for surface inspection |
| title_full |
Design of a multiple-electron-beam imaging technique for surface inspection |
| title_fullStr |
Design of a multiple-electron-beam imaging technique for surface inspection |
| title_full_unstemmed |
Design of a multiple-electron-beam imaging technique for surface inspection |
| title_sort |
design of a multiple-electron-beam imaging technique for surface inspection |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/69852 |
| _version_ |
1781783121582096384 |