Design-process integration for performance-based OPC framework
10.1109/DAC.2008.4555872
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2014
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sg-nus-scholar.10635-698852024-11-14T02:32:23Z Design-process integration for performance-based OPC framework Teh, S.-H. Heng, C.-H. Tay, A. ELECTRICAL & COMPUTER ENGINEERING Circuit performance Design-process integration Lithography Mask design OPC 10.1109/DAC.2008.4555872 Proceedings - Design Automation Conference 522-527 PDAWD 2014-06-19T03:05:46Z 2014-06-19T03:05:46Z 2008 Conference Paper Teh, S.-H.,Heng, C.-H.,Tay, A. (2008). Design-process integration for performance-based OPC framework. Proceedings - Design Automation Conference : 522-527. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/DAC.2008.4555872" target="_blank">https://doi.org/10.1109/DAC.2008.4555872</a> 9781605581156 0738100X http://scholarbank.nus.edu.sg/handle/10635/69885 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Circuit performance Design-process integration Lithography Mask design OPC |
| spellingShingle |
Circuit performance Design-process integration Lithography Mask design OPC Teh, S.-H. Heng, C.-H. Tay, A. Design-process integration for performance-based OPC framework |
| description |
10.1109/DAC.2008.4555872 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Teh, S.-H. Heng, C.-H. Tay, A. |
| format |
Conference or Workshop Item |
| author |
Teh, S.-H. Heng, C.-H. Tay, A. |
| author_sort |
Teh, S.-H. |
| title |
Design-process integration for performance-based OPC framework |
| title_short |
Design-process integration for performance-based OPC framework |
| title_full |
Design-process integration for performance-based OPC framework |
| title_fullStr |
Design-process integration for performance-based OPC framework |
| title_full_unstemmed |
Design-process integration for performance-based OPC framework |
| title_sort |
design-process integration for performance-based opc framework |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/69885 |
| _version_ |
1821200042326753280 |