Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab

Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab

10.1109/NEMS.2012.6196785

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Bibliographic Details
Main Authors: Wang, N., Hsiao, F.-L., Palaniapan, M., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
CMOS-compatible
Microelectromechanical Systems (MEMS)
phononic crystal
resonator
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69925
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Institution: National University of Singapore
Description
Summary:10.1109/NEMS.2012.6196785

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