Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab

10.1109/NEMS.2012.6196785

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Bibliographic Details
Main Authors:	Wang, N., Hsiao, F.-L., Palaniapan, M., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	CMOS-compatible Microelectromechanical Systems (MEMS) phononic crystal resonator
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/69925
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-69925
record_format	dspace
spelling	sg-nus-scholar.10635-699252015-01-19T09:25:13Z Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab Wang, N. Hsiao, F.-L. Palaniapan, M. Lee, C. ELECTRICAL & COMPUTER ENGINEERING CMOS-compatible Microelectromechanical Systems (MEMS) phononic crystal resonator 10.1109/NEMS.2012.6196785 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 326-330 2014-06-19T03:06:13Z 2014-06-19T03:06:13Z 2012 Conference Paper Wang, N.,Hsiao, F.-L.,Palaniapan, M.,Lee, C. (2012). Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab. 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 : 326-330. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/NEMS.2012.6196785" target="_blank">https://doi.org/10.1109/NEMS.2012.6196785</a> 9781467311243 http://scholarbank.nus.edu.sg/handle/10635/69925 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	CMOS-compatible Microelectromechanical Systems (MEMS) phononic crystal resonator
spellingShingle	CMOS-compatible Microelectromechanical Systems (MEMS) phononic crystal resonator Wang, N. Hsiao, F.-L. Palaniapan, M. Lee, C. Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab
description	10.1109/NEMS.2012.6196785
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wang, N. Hsiao, F.-L. Palaniapan, M. Lee, C.
format	Conference or Workshop Item
author	Wang, N. Hsiao, F.-L. Palaniapan, M. Lee, C.
author_sort	Wang, N.
title	Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab
title_short	Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab
title_full	Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab
title_fullStr	Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab
title_full_unstemmed	Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab
title_sort	development of microfabricated phononic crystal resonators based on two-dimensional silicon slab
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/69925
_version_	1681087103052546048

Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab

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