Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement

• Main Authors: Liu, X., Liu, B., Low, E.K.F., Chin, H.-C., Liu, W., Yang, M., Tan, L.S., Yeo, Y.-C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/69936
• Institution: National University of Singapore

10.1109/IEDM.2010.5703340