Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement

10.1109/IEDM.2010.5703340

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Main Authors:	Liu, X., Liu, B., Low, E.K.F., Chin, H.-C., Liu, W., Yang, M., Tan, L.S., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/69936
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-69936
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spelling	sg-nus-scholar.10635-699362015-03-23T20:11:39Z Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement Liu, X. Liu, B. Low, E.K.F. Chin, H.-C. Liu, W. Yang, M. Tan, L.S. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IEDM.2010.5703340 Technical Digest - International Electron Devices Meeting, IEDM 11.3.1-11.3.4 TDIMD 2014-06-19T03:06:20Z 2014-06-19T03:06:20Z 2010 Conference Paper Liu, X.,Liu, B.,Low, E.K.F.,Chin, H.-C.,Liu, W.,Yang, M.,Tan, L.S.,Yeo, Y.-C. (2010). Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement. Technical Digest - International Electron Devices Meeting, IEDM : 11.3.1-11.3.4. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IEDM.2010.5703340" target="_blank">https://doi.org/10.1109/IEDM.2010.5703340</a> 9781424474196 01631918 http://scholarbank.nus.edu.sg/handle/10635/69936 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/IEDM.2010.5703340
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Liu, X. Liu, B. Low, E.K.F. Chin, H.-C. Liu, W. Yang, M. Tan, L.S. Yeo, Y.-C.
format	Conference or Workshop Item
author	Liu, X. Liu, B. Low, E.K.F. Chin, H.-C. Liu, W. Yang, M. Tan, L.S. Yeo, Y.-C.
spellingShingle	Liu, X. Liu, B. Low, E.K.F. Chin, H.-C. Liu, W. Yang, M. Tan, L.S. Yeo, Y.-C. Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement
author_sort	Liu, X.
title	Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement
title_short	Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement
title_full	Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement
title_fullStr	Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement
title_full_unstemmed	Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement
title_sort	diamond-like carbon (dlc) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/69936
_version_	1681087105051131904

Diamond-like carbon (DLC) liner with highly compressive stress formed on algan/gan mos-hemts with in situ silane surface passivation for performance enhancement

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