Effect of current distribution on the reliability of multi-terminal Cu dual-damascene interconnect trees

Annual Proceedings - Reliability Physics (Symposium)

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Main Authors:	Gan, C.L., Thompson, C.V., Pey, K.L., Choi, W.K., Chang, C.W., Guo, Q.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Copper metallization Electromigration Interconnect tree Reliability
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70068
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70068
record_format	dspace
spelling	sg-nus-scholar.10635-700682015-02-19T22:40:05Z Effect of current distribution on the reliability of multi-terminal Cu dual-damascene interconnect trees Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Chang, C.W. Guo, Q. ELECTRICAL & COMPUTER ENGINEERING Copper metallization Electromigration Interconnect tree Reliability Annual Proceedings - Reliability Physics (Symposium) 594-595 ARLPB 2014-06-19T03:07:51Z 2014-06-19T03:07:51Z 2003 Conference Paper Gan, C.L.,Thompson, C.V.,Pey, K.L.,Choi, W.K.,Chang, C.W.,Guo, Q. (2003). Effect of current distribution on the reliability of multi-terminal Cu dual-damascene interconnect trees. Annual Proceedings - Reliability Physics (Symposium) : 594-595. ScholarBank@NUS Repository. 00999512 http://scholarbank.nus.edu.sg/handle/10635/70068 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Copper metallization Electromigration Interconnect tree Reliability
spellingShingle	Copper metallization Electromigration Interconnect tree Reliability Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Chang, C.W. Guo, Q. Effect of current distribution on the reliability of multi-terminal Cu dual-damascene interconnect trees
description	Annual Proceedings - Reliability Physics (Symposium)
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Chang, C.W. Guo, Q.
format	Conference or Workshop Item
author	Gan, C.L. Thompson, C.V. Pey, K.L. Choi, W.K. Chang, C.W. Guo, Q.
author_sort	Gan, C.L.
title	Effect of current distribution on the reliability of multi-terminal Cu dual-damascene interconnect trees
title_short	Effect of current distribution on the reliability of multi-terminal Cu dual-damascene interconnect trees
title_full	Effect of current distribution on the reliability of multi-terminal Cu dual-damascene interconnect trees
title_fullStr	Effect of current distribution on the reliability of multi-terminal Cu dual-damascene interconnect trees
title_full_unstemmed	Effect of current distribution on the reliability of multi-terminal Cu dual-damascene interconnect trees
title_sort	effect of current distribution on the reliability of multi-terminal cu dual-damascene interconnect trees
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70068
_version_	1681087130823032832

Effect of current distribution on the reliability of multi-terminal Cu dual-damascene interconnect trees

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