Analysis of laterally non-uniform layers and sub-micron devices by Rutherford backscattering spectrometry

by Mangelinck, D., Lee, P.S., Osipowitcz, T., Pey, K.L.
Published 2014

Expanded Papers From the 2003 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

by Pey, K.L., Radhakrishnan, M.K., Trigg, A.
Published 2014

Effect of BF2 + implantation on void formation in Ti-salicided narrow polysilicon lines

by Pey, K.L., Chua, H.N., Siah, S.Y.
Published 2014

In situ XRD analysis of Ni(Pt)/Si(100) reactions in low temperature regime ≤400 °C

by Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Chan, L.
Published 2014

On the morphological changes of Ni- and Ni(Pt)-silicides

by Lee, P.S., Pey, K.L., Mangelinck, D., Chi, D.Z., Osipowicz, T.
Published 2014

Effect of transmission line pulsing of interconnects investigated using combined low-frequency noise and resistance measurements

by Chu, L.W., Chim, W.K., Pey, K.L., See, A.
Published 2014

Effects of high current conduction in sub-micron Ti-silicided films

by Gan, C.L., Pey, K.L., Chim, W.K., Siah, S.Y.
Published 2014

Study of implanted boron distribution in p+n structures using scanning capacitance microscopy

by Teo, Y.L., Pey, K.L., Chim, W.K., Chong, Y.F.
Published 2014

Layer inversion of Ni(Pt)Si on mixed phase Si films

by Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Osipowicz, T., See, A.
Published 2014

Physical analysis of Ti-migration in 33 Å gate oxide breakdown

by Pey, K.L., Tung, C.H., Lin, W.H., Radhakrishnan, M.K.
Published 2014

Formation of voids in Ti-salicided BF+ 2-doped submicron polysilicon lines

by Chua, H.N., Pey, K.L., Lai, W.H., Siah, S.Y.
Published 2014

Porous polymeric membranes by bicontinuous microemulsion polymerization: Effect of anionic and cationic surfactants

by Chieng, T.H., Gan, L.M., Teo, W.K., Pey, K.L.
Published 2014

Experimental characterization and modeling of the reliability of three-terminal dual-damascene Cu interconnect trees

by Gan, C.L., Thompson, C.V., Pey, K.L., Choi, W.K.
Published 2014

Improved NiSi salicide process using presilicide N2 + implant for MOSFETs

by Lee, P.S., Pey, K.L., Mangelinck, D., Ding, J., Wee, A.T.S., Chan, L.
Published 2014

Control of transient enhanced diffusion of boron after laser thermal processing of preamorphized silicon

by Chong, Y.F., Pey, K.L., Wee, A.T.S., Osipowicz, T., See, A., Chan, L.
Published 2014

Study of the morphological modifications induced by laser annealing of preamorphized silicon

by Chong, Y.F., Pey, K.L., Lu, Y.F., Wee, A.T.S., See, A.
Published 2014

Comparative study of current-voltage characteristics of Ni and Ni(Pt)-alloy suicided p+/n diodes

by Chi, D.Z., Mangelinck, D., Lahiri, S.K., Lee, P.S., Pey, K.L.
Published 2016

Design and characterisation of a single-reflection, solid-state detector with high discrimination against backscattered electrons for cathodoluminescence microscopy

by Pey, K.L., Phang, J.C.H., Chan, D.S.H., Leong, Y.K.
Published 2014

A comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer

by Tan, W.L., Pey, K.L., Chooi, S.Y.M., Ye, J.H.
Published 2014

Optoelectronic material analysis and device failure analysis using SEM cathodoluminescence

by Pey, K.L., Chim, W.K., Phang, J.C.H., Chan, D.S.H.
Published 2014