Optoelectronic material analysis and device failure analysis using SEM cathodoluminescence

Microelectronics Reliability

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Bibliographic Details
Main Authors: Pey, K.L., Chim, W.K., Phang, J.C.H., Chan, D.S.H.
Other Authors: INSTITUTE OF MICROELECTRONICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80921
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Institution: National University of Singapore