Optoelectronic material analysis and device failure analysis using SEM cathodoluminescence
Microelectronics Reliability
Saved in:
Main Authors: | Pey, K.L., Chim, W.K., Phang, J.C.H., Chan, D.S.H. |
---|---|
Other Authors: | INSTITUTE OF MICROELECTRONICS |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/80921 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
Similar Items
-
CATHODOLUMINESCENCE AND ITS APPLICATIONS TO THE CHARACTERISATION OF OPTOELECTRONIC MATERIALS
by: PEY KIN LEONG
Published: (2020) -
New method for the localization of metallization defects using cathodoluminescence imaging
by: Liu, X., et al.
Published: (2014) -
An application of spectroscopic emission microscopy and cathodoluminescence to the failure analysis of near-infrared light emitting diodes
by: Pey, K.L., et al.
Published: (2014) -
Cathodoluminescence microscopy of semiconductor devices using a novel detector with high collection and backscattered electron rejection efficiency
by: Phang, J.C.H., et al.
Published: (2014) -
Cathodoluminescence evaluation of electrical stress condition of Si-SiO2 structures
by: Liu, X., et al.
Published: (2014)