Ion Beam Induced Charge imaging for the failure analysis of semiconductor devices

Ion Beam Induced Charge imaging for the failure analysis of semiconductor devices

Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA

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Bibliographic Details
Main Authors: Kolachina, S., Chan, D.S.H., Phang, J.C.H., Osipowicz, T., Sanchez, J.L., Watt, F.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/50630
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/50630

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