Ion Beam Induced Charge imaging for the failure analysis of semiconductor devices

Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA

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Bibliographic Details
Main Authors:	Kolachina, S., Chan, D.S.H., Phang, J.C.H., Osipowicz, T., Sanchez, J.L., Watt, F.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/50630
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-50630
record_format	dspace
spelling	sg-nus-scholar.10635-506302015-02-16T06:10:03Z Ion Beam Induced Charge imaging for the failure analysis of semiconductor devices Kolachina, S. Chan, D.S.H. Phang, J.C.H. Osipowicz, T. Sanchez, J.L. Watt, F. ELECTRICAL ENGINEERING PHYSICS Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA 290-295 00234 2014-04-23T03:01:50Z 2014-04-23T03:01:50Z 1997 Conference Paper Kolachina, S.,Chan, D.S.H.,Phang, J.C.H.,Osipowicz, T.,Sanchez, J.L.,Watt, F. (1997). Ion Beam Induced Charge imaging for the failure analysis of semiconductor devices. Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA : 290-295. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/50630 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Kolachina, S. Chan, D.S.H. Phang, J.C.H. Osipowicz, T. Sanchez, J.L. Watt, F.
format	Conference or Workshop Item
author	Kolachina, S. Chan, D.S.H. Phang, J.C.H. Osipowicz, T. Sanchez, J.L. Watt, F.
spellingShingle	Kolachina, S. Chan, D.S.H. Phang, J.C.H. Osipowicz, T. Sanchez, J.L. Watt, F. Ion Beam Induced Charge imaging for the failure analysis of semiconductor devices
author_sort	Kolachina, S.
title	Ion Beam Induced Charge imaging for the failure analysis of semiconductor devices
title_short	Ion Beam Induced Charge imaging for the failure analysis of semiconductor devices
title_full	Ion Beam Induced Charge imaging for the failure analysis of semiconductor devices
title_fullStr	Ion Beam Induced Charge imaging for the failure analysis of semiconductor devices
title_full_unstemmed	Ion Beam Induced Charge imaging for the failure analysis of semiconductor devices
title_sort	ion beam induced charge imaging for the failure analysis of semiconductor devices
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/50630
_version_	1681083703844929536

Ion Beam Induced Charge imaging for the failure analysis of semiconductor devices

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