Optoelectronic material analysis and device failure analysis using SEM cathodoluminescence

Microelectronics Reliability

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Bibliographic Details
Main Authors:	Pey, K.L., Chim, W.K., Phang, J.C.H., Chan, D.S.H.
Other Authors:	INSTITUTE OF MICROELECTRONICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80921
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-80921
record_format	dspace
spelling	sg-nus-scholar.10635-809212015-02-14T12:29:04Z Optoelectronic material analysis and device failure analysis using SEM cathodoluminescence Pey, K.L. Chim, W.K. Phang, J.C.H. Chan, D.S.H. INSTITUTE OF MICROELECTRONICS ELECTRICAL ENGINEERING Microelectronics Reliability 34 7 1193-1202 MCRLA 2014-10-07T03:02:44Z 2014-10-07T03:02:44Z 1994-07 Article Pey, K.L.,Chim, W.K.,Phang, J.C.H.,Chan, D.S.H. (1994-07). Optoelectronic material analysis and device failure analysis using SEM cathodoluminescence. Microelectronics Reliability 34 (7) : 1193-1202. ScholarBank@NUS Repository. 00262714 http://scholarbank.nus.edu.sg/handle/10635/80921 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Microelectronics Reliability
author2	INSTITUTE OF MICROELECTRONICS
author_facet	INSTITUTE OF MICROELECTRONICS Pey, K.L. Chim, W.K. Phang, J.C.H. Chan, D.S.H.
format	Article
author	Pey, K.L. Chim, W.K. Phang, J.C.H. Chan, D.S.H.
spellingShingle	Pey, K.L. Chim, W.K. Phang, J.C.H. Chan, D.S.H. Optoelectronic material analysis and device failure analysis using SEM cathodoluminescence
author_sort	Pey, K.L.
title	Optoelectronic material analysis and device failure analysis using SEM cathodoluminescence
title_short	Optoelectronic material analysis and device failure analysis using SEM cathodoluminescence
title_full	Optoelectronic material analysis and device failure analysis using SEM cathodoluminescence
title_fullStr	Optoelectronic material analysis and device failure analysis using SEM cathodoluminescence
title_full_unstemmed	Optoelectronic material analysis and device failure analysis using SEM cathodoluminescence
title_sort	optoelectronic material analysis and device failure analysis using sem cathodoluminescence
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80921
_version_	1681088976953278464

Optoelectronic material analysis and device failure analysis using SEM cathodoluminescence

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