Extending a GTD-based image formation technique to EUV lithography

10.1117/12.485501

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Bibliographic Details
Main Authors:	Khoh, A., Flagello, D., Milster, T., Choi, B.-I., Samudra, G.S., Wu, Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	DER EUV lithography GTD Image formation technique OPC
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70265
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Institution:	National University of Singapore

Description
Summary:	10.1117/12.485501

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