Extending a GTD-based image formation technique to EUV lithography

10.1117/12.485501

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Bibliographic Details
Main Authors:	Khoh, A., Flagello, D., Milster, T., Choi, B.-I., Samudra, G.S., Wu, Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	DER EUV lithography GTD Image formation technique OPC
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70265
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70265
record_format	dspace
spelling	sg-nus-scholar.10635-702652023-10-27T08:50:25Z Extending a GTD-based image formation technique to EUV lithography Khoh, A. Flagello, D. Milster, T. Choi, B.-I. Samudra, G.S. Wu, Y. ELECTRICAL & COMPUTER ENGINEERING DER EUV lithography GTD Image formation technique OPC 10.1117/12.485501 Proceedings of SPIE - The International Society for Optical Engineering 5037 II 682-689 PSISD 2014-06-19T03:10:08Z 2014-06-19T03:10:08Z 2003 Conference Paper Khoh, A., Flagello, D., Milster, T., Choi, B.-I., Samudra, G.S., Wu, Y. (2003). Extending a GTD-based image formation technique to EUV lithography. Proceedings of SPIE - The International Society for Optical Engineering 5037 II : 682-689. ScholarBank@NUS Repository. https://doi.org/10.1117/12.485501 0277786X http://scholarbank.nus.edu.sg/handle/10635/70265 000184179100071 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	DER EUV lithography GTD Image formation technique OPC
spellingShingle	DER EUV lithography GTD Image formation technique OPC Khoh, A. Flagello, D. Milster, T. Choi, B.-I. Samudra, G.S. Wu, Y. Extending a GTD-based image formation technique to EUV lithography
description	10.1117/12.485501
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Khoh, A. Flagello, D. Milster, T. Choi, B.-I. Samudra, G.S. Wu, Y.
format	Conference or Workshop Item
author	Khoh, A. Flagello, D. Milster, T. Choi, B.-I. Samudra, G.S. Wu, Y.
author_sort	Khoh, A.
title	Extending a GTD-based image formation technique to EUV lithography
title_short	Extending a GTD-based image formation technique to EUV lithography
title_full	Extending a GTD-based image formation technique to EUV lithography
title_fullStr	Extending a GTD-based image formation technique to EUV lithography
title_full_unstemmed	Extending a GTD-based image formation technique to EUV lithography
title_sort	extending a gtd-based image formation technique to euv lithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70265
_version_	1781783147543789568

Extending a GTD-based image formation technique to EUV lithography

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