Folded silicon resonant accelerometer with temperature compensation

Folded silicon resonant accelerometer with temperature compensation

Proceedings of IEEE Sensors

Saved in:
Bibliographic Details
Main Authors: He, L., Xu, Y.-P., Qiu, A.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
MEMS
Resonant acceleromeler
Resonator
Silicon accelerometer
Temperature compensation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/70353
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Description
Summary:Proceedings of IEEE Sensors

Similar Items