Folded silicon resonant accelerometer with temperature compensation

Folded silicon resonant accelerometer with temperature compensation

Proceedings of IEEE Sensors

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Bibliographic Details
Main Authors: He, L., Xu, Y.-P., Qiu, A.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
MEMS
Resonant acceleromeler
Resonator
Silicon accelerometer
Temperature compensation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/70353
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-703532015-01-31T12:17:15Z Folded silicon resonant accelerometer with temperature compensation He, L. Xu, Y.-P. Qiu, A. ELECTRICAL & COMPUTER ENGINEERING MEMS Resonant acceleromeler Resonator Silicon accelerometer Temperature compensation Proceedings of IEEE Sensors 1 512-515 2014-06-19T03:11:10Z 2014-06-19T03:11:10Z 2004 Conference Paper He, L.,Xu, Y.-P.,Qiu, A. (2004). Folded silicon resonant accelerometer with temperature compensation. Proceedings of IEEE Sensors 1 : 512-515. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/70353 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic MEMS
Resonant acceleromeler
Resonator
Silicon accelerometer
Temperature compensation
spellingShingle MEMS
Resonant acceleromeler
Resonator
Silicon accelerometer
Temperature compensation
He, L.
Xu, Y.-P.
Qiu, A.
Folded silicon resonant accelerometer with temperature compensation
description Proceedings of IEEE Sensors
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
He, L.
Xu, Y.-P.
Qiu, A.
format Conference or Workshop Item
author He, L.
Xu, Y.-P.
Qiu, A.
author_sort He, L.
title Folded silicon resonant accelerometer with temperature compensation
title_short Folded silicon resonant accelerometer with temperature compensation
title_full Folded silicon resonant accelerometer with temperature compensation
title_fullStr Folded silicon resonant accelerometer with temperature compensation
title_full_unstemmed Folded silicon resonant accelerometer with temperature compensation
title_sort folded silicon resonant accelerometer with temperature compensation
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/70353
_version_ 1681087183642951680

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