Influence of wafer warpage on photoresist film thickness and extinction coefficient measurements

Influence of wafer warpage on photoresist film thickness and extinction coefficient measurements

10.1117/12.711493

Saved in:
Bibliographic Details
Main Authors: Wu, X., Tay, A.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Lithography
Photoresist processing
Wafer warpage
Online Access:http://scholarbank.nus.edu.sg/handle/10635/70592
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-70592
record_format dspace
spelling sg-nus-scholar.10635-705922023-10-27T07:52:34Z Influence of wafer warpage on photoresist film thickness and extinction coefficient measurements Wu, X. Tay, A. ELECTRICAL & COMPUTER ENGINEERING Lithography Photoresist processing Wafer warpage 10.1117/12.711493 Proceedings of SPIE - The International Society for Optical Engineering 6518 PART 3 - PSISD 2014-06-19T03:13:55Z 2014-06-19T03:13:55Z 2007 Conference Paper Wu, X., Tay, A. (2007). Influence of wafer warpage on photoresist film thickness and extinction coefficient measurements. Proceedings of SPIE - The International Society for Optical Engineering 6518 (PART 3) : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.711493 0819466379 0277786X http://scholarbank.nus.edu.sg/handle/10635/70592 000247393800146 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Lithography
Photoresist processing
Wafer warpage
spellingShingle Lithography
Photoresist processing
Wafer warpage
Wu, X.
Tay, A.
Influence of wafer warpage on photoresist film thickness and extinction coefficient measurements
description 10.1117/12.711493
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Wu, X.
Tay, A.
format Conference or Workshop Item
author Wu, X.
Tay, A.
author_sort Wu, X.
title Influence of wafer warpage on photoresist film thickness and extinction coefficient measurements
title_short Influence of wafer warpage on photoresist film thickness and extinction coefficient measurements
title_full Influence of wafer warpage on photoresist film thickness and extinction coefficient measurements
title_fullStr Influence of wafer warpage on photoresist film thickness and extinction coefficient measurements
title_full_unstemmed Influence of wafer warpage on photoresist film thickness and extinction coefficient measurements
title_sort influence of wafer warpage on photoresist film thickness and extinction coefficient measurements
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/70592
_version_ 1781783169265041408

Similar Items