In-situ real-time temperature control of baking systems in lithography
10.1117/12.772719
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sg-nus-scholar.10635-706122024-11-14T02:32:29Z In-situ real-time temperature control of baking systems in lithography Wang, Y. Chua, H.-T. Tay, A. ELECTRICAL & COMPUTER ENGINEERING Real-time control Temperature control Thermal processing 10.1117/12.772719 Proceedings of SPIE - The International Society for Optical Engineering 6922 - PSISD 2014-06-19T03:14:10Z 2014-06-19T03:14:10Z 2008 Conference Paper Wang, Y., Chua, H.-T., Tay, A. (2008). In-situ real-time temperature control of baking systems in lithography. Proceedings of SPIE - The International Society for Optical Engineering 6922 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.772719 9780819471079 0277786X http://scholarbank.nus.edu.sg/handle/10635/70612 000256867000107 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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| topic |
Real-time control Temperature control Thermal processing |
| spellingShingle |
Real-time control Temperature control Thermal processing Wang, Y. Chua, H.-T. Tay, A. In-situ real-time temperature control of baking systems in lithography |
| description |
10.1117/12.772719 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Wang, Y. Chua, H.-T. Tay, A. |
| format |
Conference or Workshop Item |
| author |
Wang, Y. Chua, H.-T. Tay, A. |
| author_sort |
Wang, Y. |
| title |
In-situ real-time temperature control of baking systems in lithography |
| title_short |
In-situ real-time temperature control of baking systems in lithography |
| title_full |
In-situ real-time temperature control of baking systems in lithography |
| title_fullStr |
In-situ real-time temperature control of baking systems in lithography |
| title_full_unstemmed |
In-situ real-time temperature control of baking systems in lithography |
| title_sort |
in-situ real-time temperature control of baking systems in lithography |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/70612 |
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1821228485230723072 |