CD uniformity control via real-time control of photoresist properties

CD uniformity control via real-time control of photoresist properties

10.1117/12.771418

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Bibliographic Details
Main Authors: Chen, M., Fu, J., Ho, W.K., Tay, A.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
CD control
Photoresist processing
Real-time control
Temperature control
Online Access:http://scholarbank.nus.edu.sg/handle/10635/69571
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/69571

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