Real-time control of photoresist absorption coefficient uniformity

Real-time control of photoresist absorption coefficient uniformity

10.1117/12.598582

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Bibliographic Details
Main Authors: Tay, A., Ho, W.-K., Wu, X., Tsai, K.-Y.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Photoresist absorption coefficient
Photoresist processing
Temperature control
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71561
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/71561

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