Real-time control of photoresist absorption coefficient uniformity

10.1117/12.598582

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Bibliographic Details
Main Authors:	Tay, A., Ho, W.-K., Wu, X., Tsai, K.-Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Photoresist absorption coefficient Photoresist processing Temperature control
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71561
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-71561
record_format	dspace
spelling	sg-nus-scholar.10635-715612023-10-31T20:11:14Z Real-time control of photoresist absorption coefficient uniformity Tay, A. Ho, W.-K. Wu, X. Tsai, K.-Y. ELECTRICAL & COMPUTER ENGINEERING Photoresist absorption coefficient Photoresist processing Temperature control 10.1117/12.598582 Proceedings of SPIE - The International Society for Optical Engineering 5755 187-195 PSISD 2014-06-19T03:25:07Z 2014-06-19T03:25:07Z 2005 Conference Paper Tay, A., Ho, W.-K., Wu, X., Tsai, K.-Y. (2005). Real-time control of photoresist absorption coefficient uniformity. Proceedings of SPIE - The International Society for Optical Engineering 5755 : 187-195. ScholarBank@NUS Repository. https://doi.org/10.1117/12.598582 0277786X http://scholarbank.nus.edu.sg/handle/10635/71561 000230402000021 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Photoresist absorption coefficient Photoresist processing Temperature control
spellingShingle	Photoresist absorption coefficient Photoresist processing Temperature control Tay, A. Ho, W.-K. Wu, X. Tsai, K.-Y. Real-time control of photoresist absorption coefficient uniformity
description	10.1117/12.598582
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tay, A. Ho, W.-K. Wu, X. Tsai, K.-Y.
format	Conference or Workshop Item
author	Tay, A. Ho, W.-K. Wu, X. Tsai, K.-Y.
author_sort	Tay, A.
title	Real-time control of photoresist absorption coefficient uniformity
title_short	Real-time control of photoresist absorption coefficient uniformity
title_full	Real-time control of photoresist absorption coefficient uniformity
title_fullStr	Real-time control of photoresist absorption coefficient uniformity
title_full_unstemmed	Real-time control of photoresist absorption coefficient uniformity
title_sort	real-time control of photoresist absorption coefficient uniformity
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/71561
_version_	1781783210879877120

Real-time control of photoresist absorption coefficient uniformity

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