CD uniformity control via real-time control of photoresist properties

10.1117/12.771418

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Bibliographic Details
Main Authors:	Chen, M., Fu, J., Ho, W.K., Tay, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	CD control Photoresist processing Real-time control Temperature control
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/69571
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-69571
record_format	dspace
spelling	sg-nus-scholar.10635-695712024-11-14T02:32:32Z CD uniformity control via real-time control of photoresist properties Chen, M. Fu, J. Ho, W.K. Tay, A. ELECTRICAL & COMPUTER ENGINEERING CD control Photoresist processing Real-time control Temperature control 10.1117/12.771418 Proceedings of SPIE - The International Society for Optical Engineering 6922 - PSISD 2014-06-19T03:02:11Z 2014-06-19T03:02:11Z 2008 Conference Paper Chen, M., Fu, J., Ho, W.K., Tay, A. (2008). CD uniformity control via real-time control of photoresist properties. Proceedings of SPIE - The International Society for Optical Engineering 6922 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.771418 9780819471079 0277786X http://scholarbank.nus.edu.sg/handle/10635/69571 000256867000032 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	CD control Photoresist processing Real-time control Temperature control
spellingShingle	CD control Photoresist processing Real-time control Temperature control Chen, M. Fu, J. Ho, W.K. Tay, A. CD uniformity control via real-time control of photoresist properties
description	10.1117/12.771418
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Chen, M. Fu, J. Ho, W.K. Tay, A.
format	Conference or Workshop Item
author	Chen, M. Fu, J. Ho, W.K. Tay, A.
author_sort	Chen, M.
title	CD uniformity control via real-time control of photoresist properties
title_short	CD uniformity control via real-time control of photoresist properties
title_full	CD uniformity control via real-time control of photoresist properties
title_fullStr	CD uniformity control via real-time control of photoresist properties
title_full_unstemmed	CD uniformity control via real-time control of photoresist properties
title_sort	cd uniformity control via real-time control of photoresist properties
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/69571
_version_	1821213233699094528

CD uniformity control via real-time control of photoresist properties

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