Integrated metrology and processes for semiconductor manufacturing
10.1109/IECON.2005.1569258
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2014
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sg-nus-scholar.10635-706212015-03-06T12:45:13Z Integrated metrology and processes for semiconductor manufacturing Ho, W.K. Tay, A. Lim, K.W. Loh, A.P. Tan, W.W. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IECON.2005.1569258 IECON Proceedings (Industrial Electronics Conference) 2005 2278-2281 IEPRE 2014-06-19T03:14:15Z 2014-06-19T03:14:15Z 2005 Conference Paper Ho, W.K.,Tay, A.,Lim, K.W.,Loh, A.P.,Tan, W.W. (2005). Integrated metrology and processes for semiconductor manufacturing. IECON Proceedings (Industrial Electronics Conference) 2005 : 2278-2281. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IECON.2005.1569258" target="_blank">https://doi.org/10.1109/IECON.2005.1569258</a> 0780392523 http://scholarbank.nus.edu.sg/handle/10635/70621 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
10.1109/IECON.2005.1569258 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Ho, W.K. Tay, A. Lim, K.W. Loh, A.P. Tan, W.W. |
| format |
Conference or Workshop Item |
| author |
Ho, W.K. Tay, A. Lim, K.W. Loh, A.P. Tan, W.W. |
| spellingShingle |
Ho, W.K. Tay, A. Lim, K.W. Loh, A.P. Tan, W.W. Integrated metrology and processes for semiconductor manufacturing |
| author_sort |
Ho, W.K. |
| title |
Integrated metrology and processes for semiconductor manufacturing |
| title_short |
Integrated metrology and processes for semiconductor manufacturing |
| title_full |
Integrated metrology and processes for semiconductor manufacturing |
| title_fullStr |
Integrated metrology and processes for semiconductor manufacturing |
| title_full_unstemmed |
Integrated metrology and processes for semiconductor manufacturing |
| title_sort |
integrated metrology and processes for semiconductor manufacturing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/70621 |
| _version_ |
1681087233634861056 |