Laser precision engineering from microfabrication to nanoprocessing

• Main Authors: Hong, M.H., Huang, Z.Q., Lin, Y., Yun, J., Tan, L.S., Shian, L., Chong, T.C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/70765
• Institution: National University of Singapore

10.1109/CLEO.2008.4551308