Laser precision engineering: From microfabrication to nanoprocessing

Laser precision engineering: From microfabrication to nanoprocessing

10.1002/lpor.200810057

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Bibliographic Details
Main Authors: Chong, T.C., Hong, M.H., Shi, L.P.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Atom manipulation
Industrial applications
Laser ablation
Laser-assisted deposition
Multiphoton processes
Nanolithography
Self-assembly
Online Access:http://scholarbank.nus.edu.sg/handle/10635/56464
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/56464

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