Laser precision engineering: From microfabrication to nanoprocessing

Laser precision engineering: From microfabrication to nanoprocessing

10.1002/lpor.200810057

Saved in:
Bibliographic Details
Main Authors: Chong, T.C., Hong, M.H., Shi, L.P.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Atom manipulation
Industrial applications
Laser ablation
Laser-assisted deposition
Multiphoton processes
Nanolithography
Self-assembly
Online Access:http://scholarbank.nus.edu.sg/handle/10635/56464
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
id sg-nus-scholar.10635-56464
record_format dspace
spelling sg-nus-scholar.10635-564642023-10-29T23:03:15Z Laser precision engineering: From microfabrication to nanoprocessing Chong, T.C. Hong, M.H. Shi, L.P. ELECTRICAL & COMPUTER ENGINEERING Atom manipulation Industrial applications Laser ablation Laser-assisted deposition Multiphoton processes Nanolithography Self-assembly 10.1002/lpor.200810057 Laser and Photonics Reviews 4 1 123-143 2014-06-17T02:54:53Z 2014-06-17T02:54:53Z 2010-01 Article Chong, T.C., Hong, M.H., Shi, L.P. (2010-01). Laser precision engineering: From microfabrication to nanoprocessing. Laser and Photonics Reviews 4 (1) : 123-143. ScholarBank@NUS Repository. https://doi.org/10.1002/lpor.200810057 18638880 http://scholarbank.nus.edu.sg/handle/10635/56464 000273878500007 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Atom manipulation
Industrial applications
Laser ablation
Laser-assisted deposition
Multiphoton processes
Nanolithography
Self-assembly
spellingShingle Atom manipulation
Industrial applications
Laser ablation
Laser-assisted deposition
Multiphoton processes
Nanolithography
Self-assembly
Chong, T.C.
Hong, M.H.
Shi, L.P.
Laser precision engineering: From microfabrication to nanoprocessing
description 10.1002/lpor.200810057
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Chong, T.C.
Hong, M.H.
Shi, L.P.
format Article
author Chong, T.C.
Hong, M.H.
Shi, L.P.
author_sort Chong, T.C.
title Laser precision engineering: From microfabrication to nanoprocessing
title_short Laser precision engineering: From microfabrication to nanoprocessing
title_full Laser precision engineering: From microfabrication to nanoprocessing
title_fullStr Laser precision engineering: From microfabrication to nanoprocessing
title_full_unstemmed Laser precision engineering: From microfabrication to nanoprocessing
title_sort laser precision engineering: from microfabrication to nanoprocessing
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/56464
_version_ 1781781184266633216

Similar Items