Laser precision engineering: From microfabrication to nanoprocessing

10.1002/lpor.200810057

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Bibliographic Details
Main Authors:	Chong, T.C., Hong, M.H., Shi, L.P.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Atom manipulation Industrial applications Laser ablation Laser-assisted deposition Multiphoton processes Nanolithography Self-assembly
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/56464
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Institution:	National University of Singapore

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Summary:	10.1002/lpor.200810057

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