Laser precision engineering from microfabrication to nanoprocessing

Laser precision engineering from microfabrication to nanoprocessing

10.1109/CLEO.2008.4551308

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Bibliographic Details
Main Authors: Hong, M.H., Huang, Z.Q., Lin, Y., Yun, J., Tan, L.S., Shian, L., Chong, T.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/70765
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Institution: National University of Singapore
id sg-nus-scholar.10635-70765
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spelling sg-nus-scholar.10635-707652015-01-13T00:45:20Z Laser precision engineering from microfabrication to nanoprocessing Hong, M.H. Huang, Z.Q. Lin, Y. Yun, J. Tan, L.S. Shian, L. Chong, T.C. ELECTRICAL & COMPUTER ENGINEERING NUS NANOSCIENCE & NANOTECH INITIATIVE 10.1109/CLEO.2008.4551308 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS - 2014-06-19T03:15:58Z 2014-06-19T03:15:58Z 2008 Conference Paper Hong, M.H.,Huang, Z.Q.,Lin, Y.,Yun, J.,Tan, L.S.,Shian, L.,Chong, T.C. (2008). Laser precision engineering from microfabrication to nanoprocessing. 2008 Conference on Quantum Electronics and Laser Science Conference on Lasers and Electro-Optics, CLEO/QELS : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/CLEO.2008.4551308" target="_blank">https://doi.org/10.1109/CLEO.2008.4551308</a> 1557528594 http://scholarbank.nus.edu.sg/handle/10635/70765 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description 10.1109/CLEO.2008.4551308
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Hong, M.H.
Huang, Z.Q.
Lin, Y.
Yun, J.
Tan, L.S.
Shian, L.
Chong, T.C.
format Conference or Workshop Item
author Hong, M.H.
Huang, Z.Q.
Lin, Y.
Yun, J.
Tan, L.S.
Shian, L.
Chong, T.C.
spellingShingle Hong, M.H.
Huang, Z.Q.
Lin, Y.
Yun, J.
Tan, L.S.
Shian, L.
Chong, T.C.
Laser precision engineering from microfabrication to nanoprocessing
author_sort Hong, M.H.
title Laser precision engineering from microfabrication to nanoprocessing
title_short Laser precision engineering from microfabrication to nanoprocessing
title_full Laser precision engineering from microfabrication to nanoprocessing
title_fullStr Laser precision engineering from microfabrication to nanoprocessing
title_full_unstemmed Laser precision engineering from microfabrication to nanoprocessing
title_sort laser precision engineering from microfabrication to nanoprocessing
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/70765
_version_ 1681087260342091776

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