Mobile diffractive solid immersion lens design for backside laser based fault localization
Conference Proceedings from the International Symposium for Testing and Failure Analysis
Saved in:
| Main Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
2014
|
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/70964 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-70964 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-709642015-04-23T00:17:33Z Mobile diffractive solid immersion lens design for backside laser based fault localization Goh, S.H. Cho, J.Y. Lam, J. Phang, J.C.H. ELECTRICAL & COMPUTER ENGINEERING Conference Proceedings from the International Symposium for Testing and Failure Analysis 32-37 2014-06-19T03:18:19Z 2014-06-19T03:18:19Z 2010 Conference Paper Goh, S.H.,Cho, J.Y.,Lam, J.,Phang, J.C.H. (2010). Mobile diffractive solid immersion lens design for backside laser based fault localization. Conference Proceedings from the International Symposium for Testing and Failure Analysis : 32-37. ScholarBank@NUS Repository. 9781615030415 http://scholarbank.nus.edu.sg/handle/10635/70964 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| country |
Singapore |
| collection |
ScholarBank@NUS |
| description |
Conference Proceedings from the International Symposium for Testing and Failure Analysis |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Goh, S.H. Cho, J.Y. Lam, J. Phang, J.C.H. |
| format |
Conference or Workshop Item |
| author |
Goh, S.H. Cho, J.Y. Lam, J. Phang, J.C.H. |
| spellingShingle |
Goh, S.H. Cho, J.Y. Lam, J. Phang, J.C.H. Mobile diffractive solid immersion lens design for backside laser based fault localization |
| author_sort |
Goh, S.H. |
| title |
Mobile diffractive solid immersion lens design for backside laser based fault localization |
| title_short |
Mobile diffractive solid immersion lens design for backside laser based fault localization |
| title_full |
Mobile diffractive solid immersion lens design for backside laser based fault localization |
| title_fullStr |
Mobile diffractive solid immersion lens design for backside laser based fault localization |
| title_full_unstemmed |
Mobile diffractive solid immersion lens design for backside laser based fault localization |
| title_sort |
mobile diffractive solid immersion lens design for backside laser based fault localization |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/70964 |
| _version_ |
1681087296779059200 |