Modeling of stress-retarded orientation-dependent oxidation: Shape engineering of silicon nanowire channels

10.1109/IEDM.2009.5424306

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Main Authors:	Ma, F.-J., Rustagi, S.C., Zhao, H., Samudra, G.S., Singh, N., Budhaaraju, K.D., Lo, G.Q., Kwong, D.L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70997
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70997
record_format	dspace
spelling	sg-nus-scholar.10635-709972015-02-26T10:21:34Z Modeling of stress-retarded orientation-dependent oxidation: Shape engineering of silicon nanowire channels Ma, F.-J. Rustagi, S.C. Zhao, H. Samudra, G.S. Singh, N. Budhaaraju, K.D. Lo, G.Q. Kwong, D.L. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IEDM.2009.5424306 Technical Digest - International Electron Devices Meeting, IEDM 21.5.1-21.5.4 TDIMD 2014-06-19T03:18:41Z 2014-06-19T03:18:41Z 2009 Conference Paper Ma, F.-J.,Rustagi, S.C.,Zhao, H.,Samudra, G.S.,Singh, N.,Budhaaraju, K.D.,Lo, G.Q.,Kwong, D.L. (2009). Modeling of stress-retarded orientation-dependent oxidation: Shape engineering of silicon nanowire channels. Technical Digest - International Electron Devices Meeting, IEDM : 21.5.1-21.5.4. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IEDM.2009.5424306" target="_blank">https://doi.org/10.1109/IEDM.2009.5424306</a> 9781424456406 01631918 http://scholarbank.nus.edu.sg/handle/10635/70997 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/IEDM.2009.5424306
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Ma, F.-J. Rustagi, S.C. Zhao, H. Samudra, G.S. Singh, N. Budhaaraju, K.D. Lo, G.Q. Kwong, D.L.
format	Conference or Workshop Item
author	Ma, F.-J. Rustagi, S.C. Zhao, H. Samudra, G.S. Singh, N. Budhaaraju, K.D. Lo, G.Q. Kwong, D.L.
spellingShingle	Ma, F.-J. Rustagi, S.C. Zhao, H. Samudra, G.S. Singh, N. Budhaaraju, K.D. Lo, G.Q. Kwong, D.L. Modeling of stress-retarded orientation-dependent oxidation: Shape engineering of silicon nanowire channels
author_sort	Ma, F.-J.
title	Modeling of stress-retarded orientation-dependent oxidation: Shape engineering of silicon nanowire channels
title_short	Modeling of stress-retarded orientation-dependent oxidation: Shape engineering of silicon nanowire channels
title_full	Modeling of stress-retarded orientation-dependent oxidation: Shape engineering of silicon nanowire channels
title_fullStr	Modeling of stress-retarded orientation-dependent oxidation: Shape engineering of silicon nanowire channels
title_full_unstemmed	Modeling of stress-retarded orientation-dependent oxidation: Shape engineering of silicon nanowire channels
title_sort	modeling of stress-retarded orientation-dependent oxidation: shape engineering of silicon nanowire channels
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70997
_version_	1681087302977191936

Modeling of stress-retarded orientation-dependent oxidation: Shape engineering of silicon nanowire channels

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