Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis

Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis

10.1109/IPFA.2009.5232707

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Bibliographic Details
Main Authors: Phang, J.C.H., Gohl, S.H., Quah, A.C.T., Chua, M., Koh, L.S., Tan, S.H., Chua, W.P.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/71626
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Institution: National University of Singapore
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Summary:10.1109/IPFA.2009.5232707

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