Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis

10.1109/IPFA.2009.5232707

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Bibliographic Details
Main Authors:	Phang, J.C.H., Gohl, S.H., Quah, A.C.T., Chua, M., Koh, L.S., Tan, S.H., Chua, W.P.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/71626
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-71626
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spelling	sg-nus-scholar.10635-716262015-01-28T08:43:07Z Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis Phang, J.C.H. Gohl, S.H. Quah, A.C.T. Chua, M. Koh, L.S. Tan, S.H. Chua, W.P. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IPFA.2009.5232707 Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 11-18 2014-06-19T03:25:53Z 2014-06-19T03:25:53Z 2009 Conference Paper Phang, J.C.H.,Gohl, S.H.,Quah, A.C.T.,Chua, M.,Koh, L.S.,Tan, S.H.,Chua, W.P. (2009). Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis. Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA : 11-18. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IPFA.2009.5232707" target="_blank">https://doi.org/10.1109/IPFA.2009.5232707</a> 9781424439102 http://scholarbank.nus.edu.sg/handle/10635/71626 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/IPFA.2009.5232707
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Phang, J.C.H. Gohl, S.H. Quah, A.C.T. Chua, M. Koh, L.S. Tan, S.H. Chua, W.P.
format	Conference or Workshop Item
author	Phang, J.C.H. Gohl, S.H. Quah, A.C.T. Chua, M. Koh, L.S. Tan, S.H. Chua, W.P.
spellingShingle	Phang, J.C.H. Gohl, S.H. Quah, A.C.T. Chua, M. Koh, L.S. Tan, S.H. Chua, W.P. Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis
author_sort	Phang, J.C.H.
title	Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis
title_short	Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis
title_full	Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis
title_fullStr	Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis
title_full_unstemmed	Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis
title_sort	resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/71626
_version_	1681087418039533568

Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis

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