Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis

• Main Authors: Phang, J.C.H., Gohl, S.H., Quah, A.C.T., Chua, M., Koh, L.S., Tan, S.H., Chua, W.P.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/71626
• Institution: National University of Singapore

10.1109/IPFA.2009.5232707